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検索キーワード：(件名: #Plasma etching)
該当件数:12件
Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm
Boston ; Tokyo : Academic Press , c1989. - (Plasma-materials interactions)
図書
Low pressure plasmas and microstructuring technology / Gerhard Franz
Berlin : Springer , c2009
Plasma deposition, treatment, and etching of polymers / edited by Riccardo d'Agostino
Boston : Academic Press , c1990. - (Plasma-materials interactions)
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood
Park Ridge, N.J. : Noyes Publications , c1990. - (Materials science and process technology series)
Plasma etching in semiconductor fabrication / Russ A. Morgan
Amsterdam ; Tokyo : Elsevier , c1985. - (Plasma technology ; 1)
Dry etching for microelectronics / edited by Ronald A. Powell
Amsterdam ; Tokyo : North-Holland. - New York, N.Y. : Distributors for the USA and Canada, Elsevier Science Pub. Co. , 1984. - (Materials processing, theory and practices ; v. 4)
Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg
New York : Wiley , c1994
2nd ed. - Hoboken, N.J. : Wiley-Interscience , c2005
Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles
Pittsburgh, Pa. : Materials Research Society , c1985. - (Materials Research Society symposia proceedings ; v. 38)
Applications of plasma processes to VLSI technology / edited by Takuo Sugano ; translated by Hyo-gun Kim
New York : Wiley , c1985
Plasma-surface interactions and processing of materials / edited by Orland Auciello ... [et al.]
Dordrecht ; Boston : Kluwer Academic Publishers , c1990. - (NATO ASI series ; ser. E . Applied sciences ; no. 176)
Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A. / editors, Vincent M. Donnelly, Irving P. Herman, Masataka Hirose
Pittsburgh, Pa. : Materials Research Society , c1987. - (Materials Research Society symposia proceedings ; v. 75)
