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RT Book, Whole SR Print DC OPAC T1 Plasma electronics : applications in microelectronic device fabrication / by T. Makabe and Z. Petrović T2 Series in plasma physics A1 真壁, 利明 A1 Petrović, Z. (Zoran Lj) YR 2006 FD 2006 SP 339 p. K1 Plasma engineering PB Taylor & Francis PP Boca Raton, FL SN 0750309768 LA English (英語) CL LCC:TA2020 CL DC22:621.044 NO Includes bibliographical references and index NO 書誌ID=1000073642; NCID=BA76918777; LK [OPAC]https://libop-nifs.nifs.ac.jp/opac/opac_link/bibid/1000073642 LK [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/DocDetail?hdn_if_lang=jpn&txt_docid=NCID:BA76918777; [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/EqualFromForm?txt_isbn=0750309768 OL 30