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RT Book, Whole SR Print DC OPAC T1 Film deposition by plasma techniques / Mitsuharu Konuma T2 Springer series on atoms + plasmas A1 小沼, 光晴 (1950-) YR 1992 FD c1992 VO : Germany VO : New York SP ix , 224 p. K1 Thin films K1 Plasma-enhanced chemical vapor deposition PB Springer-Verlag PP Berlin ; Tokyo SN 3540540571 SN 0387540571 LA English (英語) CL LCC:TK7871.15.F5 CL DC20:621.381/52 NO Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref NO Includes bibliographical references and index NO 書誌ID=1000017039; NCID=BA14397573; LK [OPAC]https://libop-nifs.nifs.ac.jp/opac/opac_link/bibid/1000017039 LK [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/DocDetail?hdn_if_lang=jpn&txt_docid=NCID:BA14397573; [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/EqualFromForm?txt_isbn=3540540571 OL 30