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RT Book, Whole SR Print DC OPAC T1 Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley A1 *Townsend, Peter David A1 Kelly, J. C. (John Clive) A1 Hartley, W. N. YR 1976 FD 1976 SP ix, 333 p. K1 Ion implantation K1 Sputtering (Physics) PB Academic Press PP London ; New York SN 0126969507 LA English (英語) CL LCC:QC702.7.I55 CL DC:530.4/1 NO Includes bibliographies and index NO 書誌ID=1000014694; NCID=BA07511624; LK [OPAC]https://libop-nifs.nifs.ac.jp/opac/opac_link/bibid/1000014694 LK [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/DocDetail?hdn_if_lang=jpn&txt_docid=NCID:BA07511624; [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/EqualFromForm?txt_isbn=0126969507 OL 30