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RT Book, Whole SR Print DC OPAC T1 Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm T2 Plasma-materials interactions A1 Manos, Dennis M. A1 Flamm, Daniel L. YR 1989 FD c1989 SP xii, 476 p. K1 Plasma etching PB Academic Press PP Boston ; Tokyo SN 0124693709 LA English (英語) CL LCC:TA2020 CL DC19:621.044 CL NDC8:427.6 NO Includes bibliographical references and index NO 書誌ID=1000011338; NCID=BA07363130; LK [OPAC]https://libop-nifs.nifs.ac.jp/opac/opac_link/bibid/1000011338 LK [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/DocDetail?hdn_if_lang=jpn&txt_docid=NCID:BA07363130; [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/EqualFromForm?txt_isbn=0124693709 OL 30