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RT Book, Whole SR Print DC OPAC T1 Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.] A1 *Brewer, George Raymond, 1922- A1 Ballantyne, J. P. YR 1980 FD 1980 VO est. SP xi, 362 p. K1 Microelectronics K1 Lithography, Electron beam PB Academic Press PP New York SN 012133550X SN 012133550X LA English (英語) CL LCC:TK7874 CL DC:621.381/7 NO Includes bibliographies and index NO 書誌ID=1000010590; NCID=BA03079113; LK [OPAC]https://libop-nifs.nifs.ac.jp/opac/opac_link/bibid/1000010590 LK [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/DocDetail?hdn_if_lang=jpn&txt_docid=NCID:BA03079113; [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/EqualFromForm?txt_isbn=012133550X OL 30