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RT Book, Whole SR Print DC OPAC T1 Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A. / editors, Vincent M. Donnelly, Irving P. Herman, Masataka Hirose T2 Materials Research Society symposia proceedings A1 Donnelly, Vincent M. A1 Herman, Irving P. A1 広瀬, 全孝(1939-) A1 Materials Research Society A1 Materials Research Society. Meeting A1 Symposium on Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces YR 1987 FD c1987 SP xix, 826 p. K1 Materials -- Effect of radiation on -- Congresses K1 Surface chemistry -- Congresses K1 Lasers -- Industrial applications -- Congresses K1 Photon beams -- Industrial applications -- Congresses K1 Plasma etching -- Congresses PB Materials Research Society PP Pittsburgh, Pa. SN 0931837413 LA English (英語) CL LCC:TA418.6 CL DC19:620.1/1228 NO 書誌ID=1000010516; NCID=BA0143036X; LK [OPAC]https://libop-nifs.nifs.ac.jp/opac/opac_link/bibid/1000010516 LK [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/DocDetail?hdn_if_lang=jpn&txt_docid=NCID:BA0143036X; [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/EqualFromForm?txt_isbn=0931837413 OL 30