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RT Book, Whole SR Print DC OPAC T1 Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A. / editors, B.R. Appleton, F.H. Eisen, T.W. Sigmon T2 Materials Research Society symposia proceedings A1 Appleton, B. R. A1 Eisen, Fred H. A1 Sigmon, T. W. A1 Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology A1 Materials Research Society A1 Materials Research Society. Meeting YR 1985 FD c1985 SP xv, 393 p. K1 Semiconductors -- Congresses K1 Ion implantation -- Congresses PB Materials Research Society PP Pittsburgh, Pa. SN 0931837103 LA English (英語) CL LCC:TK7871.85 CL DC19:621.3815/2 NO "These proceedings are a referred account of the Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology presented at the 1985 spring meeting of the Materials Research Society, April 15-18, 1985, in San Francisco, California."--Pref NO Includes bibliographies and indexes NO BIBID=1000056872; NCID=BA03908025; LK [OPAC]https://libop-nifs.nifs.ac.jp/opac/opac_link/bibid/1000056872 LK [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/DocDetail?hdn_if_lang=eng&txt_docid=NCID:BA03908025; [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/en/EqualFromForm?hdn_if_lang=eng&txt_isbn=0931837103 OL 30