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RT Book, Whole SR Print DC OPAC T1 Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982 / editors, H. Ryssel and H. Glawischnig T2 Springer series in electrophysics A1 Ion Implantation School A1 Ryssel, Heiner, 1941- A1 Glawischnig, H. (Hans), 1939- A1 International Conference on Ion Implantation: Equipment and Techniques YR 1982 FD 1982 VO : us VO : gw SP xii, 372 p. K1 Ion implantation -- Addresses, essays, lectures K1 Semiconductor doping -- Addresses, essays, lectures PB Springer-Verlag PP Berlin ; New York SN 0387118780 SN 3540118780 LA English (英語) CL LCC:TK7871.85 CL DC19:621.3815/2 NO Includes bibliographies and index NO BIBID=1000055210; NCID=BA07160406; LK [OPAC]https://libop-nifs.nifs.ac.jp/opac/opac_link/bibid/1000055210 LK [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/DocDetail?hdn_if_lang=eng&txt_docid=NCID:BA07160406; [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/en/EqualFromForm?hdn_if_lang=eng&txt_isbn=0387118780 OL 30