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RT Book, Whole SR Print DC OPAC T1 High vacuum production in the microelectronics industry / Pierre Duval T2 Plasma technology A1 *Duval, Pierre YR 1988 FD 1988 SP xiii, 222 p. K1 Microelectronics industries. Applications of vacuum technology PB Elsevier PP Amsterdam; Tokyo SN 044442878X LA English (英語) CL DC19:621.5/5 NO Includes index NO BIBID=1000054322; NCID=BA03949791; LK [OPAC]https://libop-nifs.nifs.ac.jp/opac/opac_link/bibid/1000054322 LK [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/DocDetail?hdn_if_lang=eng&txt_docid=NCID:BA03949791; [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/en/EqualFromForm?hdn_if_lang=eng&txt_isbn=044442878X OL 30