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RT Book, Whole SR Print DC OPAC T1 Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg A1 Lieberman, M. A. (Michael A.) A1 Lichtenberg, Allan J YR 2005 FD c2005 SP xxxv, 757 p. K1 Plasma dynamics K1 Thin films -- Surfaces K1 Plasma etching K1 Plasma chemistry -- Industrial applications ED 2nd ed PB Wiley-Interscience PP Hoboken, N.J. SN 0471720011 LA English (英語) CL LCC:QC718.5.D9 CL DC22:530.4/4 NO Includes bibliographical references (p. 735-748) and index NO 書誌ID=1000071154; NCID=BA72469354; LK [OPAC]https://libop-nifs.nifs.ac.jp/opac/opac_link/bibid/1000071154 LK [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/DocDetail?hdn_if_lang=jpn&txt_docid=NCID:BA72469354; [Webcat Plus]http://webcatplus-equal.nii.ac.jp/libportal/EqualFromForm?txt_isbn=0471720011 OL 30