<Journals>
Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
Material Type | Journals |
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Year | 1991- |
Publisher | New York : American Institute of Physics |
Size | v. : ill. ; 29 cm |
Other titles | cover title:Journal of vacuum science and technology. B, 2nd series. Nanotechnology & microelectronics: mateials, processing, mesurement, & phenomena spine title:JVSTB, Nanotechnology & microelectronics |
Notes about History of the Documents | Continues:Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society |
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Location | Volumes | Year | Call No. | Comment |
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2F | 9-25 | 1991-2007 | F237-38 |
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Other titles | cover title:Journal of vacuum science and technology. B, 2nd series. Nanotechnology & microelectronics: mateials, processing, mesurement, & phenomena spine title:JVSTB, Nanotechnology & microelectronics |
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Notes about History of the Documents | Continues:Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society |
ID | 2000000713 |
ISSN | 21662746 |
NCID | AA10804928 |