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＜Journals＞
Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
| Material Type | Journals |
|---|---|
| Year | 1983-1990 |
| Publisher | New York : American Institute of Physics |
| Size | 8 v. : ill. ; 29 cm |
| Other titles | abbreviated title:J. vac. sci. technol., B, Microelectronics process. phenom key title:Journal of vacuum science & technology. B, Microelectronics processing and phenomena variant access title:Journal of vacuum science and technology. B, Microelectronics processing and phenomena variant access title:Microelectronics processing and phenomena |
| Notes about History of the Documents | Continues:Journal of vacuum science and technology / American Vacuum Society Continued by:Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena |
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| Location | Volumes | Year | Call No. | Comment |
|---|---|---|---|---|
| 2F | 1-8 | 1983-1990 | F237-38 |
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Holding volume list
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| Location | Volumes | Year/Date | Barcode No. | Status | Comment | Reserve |
|---|---|---|---|---|---|---|
| 2F 8(5-6) 1990-1990 | ||||||
| 2F | 8(5-6) | 1990-1990 | 20155792 |
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| 2F 8(1-4) 1990-1990 | ||||||
| 2F | 8(1-4) | 1990-1990 | 20157004 |
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| 2F 7(5-6) 1989-1989 | ||||||
| 2F | 7(5-6) | 1989-1989 | 20156998 |
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| 2F 7(1-4) 1989-1989 | ||||||
| 2F | 7(1-4) | 1989-1989 | 20156980 |
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| 2F 6(1055-2408) 1988-1988 | ||||||
| 2F | 6(1055-2408) | 1988-1988 | 20156972 |
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| 2F 6(1-1054) 1988-1988 | ||||||
| 2F | 6(1-1054) | 1988-1988 | 20156964 |
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| 2F 5(843-1832) 1987-1987 | ||||||
| 2F | 5(843-1832) | 1987-1987 | 20156956 |
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| 2F 5(1-842) 1987-1987 | ||||||
| 2F | 5(1-842) | 1987-1987 | 20156949 |
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| 2F 4(789-1548) 1986-1986 | ||||||
| 2F | 4(789-1548) | 1986-1986 | 20156931 |
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| 2F 4(1-788) 1986-1986 | ||||||
| 2F | 4(1-788) | 1986-1986 | 20156923 |
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| 2F 3(939-1800) 1985-1985 | ||||||
| 2F | 3(939-1800) | 1985-1985 | 20156915 |
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| 2F 3(1-938) 1985-1985 | ||||||
| 2F | 3(1-938) | 1985-1985 | 20156907 |
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| 2F 2 1984-1984 | ||||||
| 2F | 2 | 1984-1984 | 20156899 |
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| 2F 1(519-1450) 1983-1983 | ||||||
| 2F | 1(519-1450) | 1983-1983 | 20156881 |
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| 2F 1(1-518) 1983-1983 | ||||||
| 2F | 1(1-518) | 1983-1983 | 20156873 |
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Hide details.
| Other titles | abbreviated title:J. vac. sci. technol., B, Microelectronics process. phenom key title:Journal of vacuum science & technology. B, Microelectronics processing and phenomena variant access title:Journal of vacuum science and technology. B, Microelectronics processing and phenomena variant access title:Microelectronics processing and phenomena |
|---|---|
| Notes | Title from cover Issued also on microfilm |
| Notes about History of the Documents | Continues:Journal of vacuum science and technology / American Vacuum Society Continued by:Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena |
| ID | 2000000576 |
| ISSN | 0734211X |
| NCID | AA10635106 |