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Radio frequency power in plasmas : proceedings of the 20th topical conference, Sorrento, Italy, 25-28 June 2013 / editors, Angelo A. Tuccillo, Silvio Ceccuzzi
(AIP conference proceedings ; 1580)

Material Type Books
Publisher Melville, N.Y. : American Institute of Physics
Year c2014
Size 569 p. : ill. ; 27 cm

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3F
426BB||Pc-Rad||2013 50020973

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Notes "20th Topical Conference on Radio Frequency Power in Plasmas"--Pref
Includes bibliographical references and index
Authors *Topical Conference on Radio Frequency Power in Plasmas (20th : 2013 : Sorrento)
Tuccillo, Angelo A.
Ceccuzzi, Silvio
ID 1000081523