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＜Books＞
EUV sources for lithography / Vivek Bakshi
| Material Type | Books |
|---|---|
| Publisher | Bellingham, Wash. : SPIE Press |
| Classification | LCC:QC459 DC22:621.36/4 |
| Year | 2005 |
| Size | xxxv, 1057 p. : ill. ; 26 cm |
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| Notes | Includes bibliographical references and index |
|---|---|
| Authors | Bakshi, Vivek |
| Subjects | LCSH:Ultraviolet radiation -- Industrial applications
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LCSH:Plasma (Ionized gases) LCSH:Lithography |
| ID | 1000076768 |
| NCID | BA76429737 |