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Radio frequency power in plasmas : 16th Topical Conference on Radio Frequency Power in Plasmas, Park City, Utah 11-13 April 2005 / editors, Stephen J. Wukitch, Paul T. Bonoli
(AIP conference proceedings ; v. 787)

Material Type Books
Publisher Melville, N.Y : American Institute of Physics
Year c2005
Size xiii, 457 p. : ill. ; 25 cm

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426BB||Pc-Rad||2005 50012137