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Radio frequency power in plasmas : 15th Topical Conference on Radio Frequency Power in Plasmas, Moran, Wyoming 19-21 May 2003 / editor, Cary B. Forest
(AIP conference proceedings ; v. 694)

Material Type Books
Publisher Melville, N.Y : American Institute of Physics
Year c2003
Size xv, 520 p. : ill. ; 25 cm

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426BB||Pc-Rad||2003 50012129