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Fundamental electron interactions with plasma processing gases / Loucas G. Christophorou and James K. Olthoff
(Physics of atoms and molecules)

Material Type Books
Publisher New York : Kluwer Academic/Plenum Publishers
Classification LCC:QC794.6.C6
DC22:539.7/57
Year c2004
Size xii, 776 p. : ill. ; 26 cm

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3F
426BB||Chr 50011162

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Notes Includes bibliographical references and index
Authors Christophorou, L. G.
Olthoff, James Kenneth, 1958-
Subjects LCSH:Electron-molecule collisions
LCSH:Plasma (Ionized gases)
ID 1000069682
NCID BA65557815

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