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＜Books＞
High vacuum production in the microelectronics industry / Pierre Duval
(Plasma technology ; 2)
| Material Type | Books |
|---|---|
| Publisher | Amsterdam; Tokyo : Elsevier |
| Classification | DC19:621.5/5 |
| Year | 1988 |
| Size | xiii, 222 p. : ill. ; 25 cm |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
|---|---|---|---|---|---|---|
| 3F |
|
426E||Pla||2 | 10045987 |
|
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| Notes | Includes index |
|---|---|
| Authors | *Duval, Pierre |
| Subjects | PRECIS:Microelectronics industries. Applications of vacuum technology |
| ID | 1000054322 |
| NCID | BA03949791 |