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Radio frequency power in plasmas : 12th Topical Conference : Savannah, GA April 1997 / editors, Philip M. Ryan, Thomas Intrator
(AIP conference proceedings ; no. 403)

Material Type Books
Publisher Woodbury, N.Y : American Institute of Physics
Classification DC21:530.44
Year 1997
Size xiii, 496 p. : ill. ; 25 cm

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3F
426BB||Pc-Rad||1997 50002955

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