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＜Books＞
Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg
| Material Type | Books |
|---|---|
| Publisher | New York : Wiley |
| Classification | NDC8:427.6 LCC:QC718.5.D9 DC20:530.4/4 |
| Year | c1994 |
| Size | xxvi, 572 p. : ill. ; 25 cm |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
|---|---|---|---|---|---|---|
| 3F |
|
426BB||Lie | 10027449 |
|
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| Notes | Includes bibliographical references (p. 559-564) and index "A Wiley-Interscience publication." |
|---|---|
| Authors | *Lieberman, M. A. (Michael A.) Lichtenberg, Allan J |
| Subjects | LCSH:Plasma dynamics LCSH:Thin films -- Surfaces All Subject Search LCSH:Plasma etching LCSH:Plasma chemistry |
| ID | 1000017308 |
| NCID | BA2405445X |