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＜Books＞
Electron and ion optics / Miklos Szilagyi
(Microdevices : physics and fabrication technologies)
| Material Type | Books |
|---|---|
| Publisher | New York : Plenum Press |
| Classification | LCC:QC793.5.E62 DC19:537.5/6 |
| Year | c1988 |
| Size | xvi, 539 p. : ill. ; 26 cm |
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| Notes | Includes index Bibliography: p. 515-528 |
|---|---|
| Authors | *Szilágyi, Miklós |
| Subjects | LCSH:Electron optics LCSH:Electron beams LCSH:Ion bombardment LCSH:Electromagnetic lenses |
| ID | 1000015996 |
| NCID | BA03946294 |