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＜Books＞
Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm
(Plasma-materials interactions)
| Material Type | Books |
|---|---|
| Publisher | Boston ; Tokyo : Academic Press |
| Classification | LCC:TA2020 DC19:621.044 NDC8:427.6 |
| Year | c1989 |
| Size | xii, 476 p. : ill. ; 24 cm |
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| Notes | Includes bibliographical references and index |
|---|---|
| Authors | Manos, Dennis M. Flamm, Daniel L. |
| Subjects | LCSH:Plasma etching |
| ID | 1000011338 |
| NCID | BA07363130 |