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＜Books＞
Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg
| Material Type | Books |
|---|---|
| Publisher | Hoboken, N.J. : Wiley-Interscience |
| Classification | LCC:QC718.5.D9 DC22:530.4/4 |
| Year | c2005 |
| Size | xxxv, 757 p. : ill. ; 25 cm |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
|---|---|---|---|---|---|---|
| 3F |
|
426BB||Lie||2nd ed. | 50011865 |
|
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| Notes | Includes bibliographical references (p. 735-748) and index |
|---|---|
| Authors | *Lieberman, M. A. (Michael A.) Lichtenberg, Allan J |
| Subjects | LCSH:Plasma dynamics LCSH:Thin films -- Surfaces All Subject Search LCSH:Plasma etching LCSH:Plasma chemistry -- Industrial applications All Subject Search |
| ID | 1000071154 |
| NCID | BA72469354 |