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＜Books＞
Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart
| Material Type | Books |
|---|---|
| Publisher | New York : Academic Press |
| Classification | LCC:TP156.V3 DC19:621.5/5 |
| Year | 1983 |
| Size | viii, 151 p. : ill. ; 24 cm |
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| Notes | Includes index |
|---|---|
| Authors | *Stuart, R. V. |
| Subjects | LCSH:Vacuum technology LCSH:Thin films LCSH:Cathode sputtering (Plating process) |
| ID | 1000016335 |
| NCID | BA06945480 |