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＜Journals＞
Journal of vacuum science and technology / American Vacuum Society
| Material Type | Journals |
|---|---|
| Publication | New York : American Institute of Physics |
| Other titles | variant access title:Journal of Vacuum Science & Technology |
| Notes about History of the Documents | Continued by:Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society Continued by:Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society |
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| Other titles | variant access title:Journal of Vacuum Science & Technology |
|---|---|
| Notes about History of the Documents | Continued by:Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society Continued by:Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society |
| Authors | American Vacuum Society |
| Subjects | LCSH:Vacuum technology -- Periodicals All Subject Search |
| ID | 2000000363 |
| ISSN | 00225355 |
| NCID | AA00708677 |