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1
Plasma etching in semiconductor fabrication / Russ A. Morgan
Amsterdam ; Tokyo : Elsevier , c1985
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| 2 |
2
High vacuum production in the microelectronics industry / Pierre Duval
Amsterdam; Tokyo : Elsevier , 1988
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| 3 |
3
Plasma polymerization processes / Hynek Biederman, Yoshihito Osada
Amsterdam ; Tokyo : Elsevier. - New York, N.Y. : Distributors for the United States and Canada: Elsevier Science , 1992
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| 4 |
4
Microwave excited plasmas / edited by Michel Moisan, Jacques Pelletier
Amsterdam ; New York : Elsevier , 1992
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