<Books>
EUV sources for lithography / Vivek Bakshi
Material Type | Books |
---|---|
Publisher | Bellingham, Wash. : SPIE Press |
Classification | LCC:QC459 DC22:621.36/4 |
Year | 2005 |
Size | xxxv, 1057 p. : ill. ; 26 cm |
Hide book details.
Hide details.
Notes | Includes bibliographical references and index |
---|---|
Authors | Bakshi, Vivek |
Subjects | LCSH:Ultraviolet radiation -- Industrial applications
All Subject Search
LCSH:Plasma (Ionized gases) LCSH:Lithography |
ID | 1000076768 |
NCID | BA76429737 |