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＜Books＞
Low pressure plasmas and microstructuring technology / Gerhard Franz
| Material Type | Books |
|---|---|
| Publisher | Berlin : Springer |
| Classification | DC22:621.044 |
| Year | c2009 |
| Size | xxiv, 732 p. : ill. ; 25 cm |
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| Notes | Includes bibliographical references and index |
|---|---|
| Authors | *Franz, Gerhard |
| Subjects | LCSH:Plasma (Ionized gases) -- Industrial applications
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LCSH:Plasma engineering LCSH:Plasma etching |
| ID | 1000074969 |
| NCID | BA9169860X |