<Books>
Low pressure plasmas and microstructuring technology / Gerhard Franz
Material Type | Books |
---|---|
Publisher | Berlin : Springer |
Classification | DC22:621.044 |
Year | c2009 |
Size | xxiv, 732 p. : ill. ; 25 cm |
Hide book details.
Hide details.
Notes | Includes bibliographical references and index |
---|---|
Authors | *Franz, Gerhard |
Subjects | LCSH:Plasma (Ionized gases) -- Industrial applications
All Subject Search
LCSH:Plasma engineering LCSH:Plasma etching |
ID | 1000074969 |
NCID | BA9169860X |