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＜Books＞
Plasma electronics : applications in microelectronic device fabrication / by T. Makabe and Z. Petrović
(Series in plasma physics)
| Material Type | Books |
|---|---|
| Publisher | Boca Raton, FL : Taylor & Francis |
| Classification | LCC:TA2020 DC22:621.044 |
| Year | 2006 |
| Size | 339 p. : ill. ; 24 cm |
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| Notes | Includes bibliographical references and index |
|---|---|
| Authors | 真壁, 利明 <マカベ, トシアキ> Petrović, Z. (Zoran Lj) |
| Subjects | LCSH:Plasma engineering |
| ID | 1000073642 |
| NCID | BA76918777 |