<Books>
Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg
Material Type | Books |
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Publisher | Hoboken, N.J. : Wiley-Interscience |
Classification | LCC:QC718.5.D9 DC22:530.4/4 |
Year | c2005 |
Size | xxxv, 757 p. : ill. ; 25 cm |
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Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
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3F |
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426BB||Lie||2nd ed. | 50011865 |
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Notes | Includes bibliographical references (p. 735-748) and index |
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Authors | *Lieberman, M. A. (Michael A.) Lichtenberg, Allan J |
Subjects | LCSH:Plasma dynamics LCSH:Thin films -- Surfaces All Subject Search LCSH:Plasma etching LCSH:Plasma chemistry -- Industrial applications All Subject Search |
ID | 1000071154 |
NCID | BA72469354 |