<Books>
Fundamental electron interactions with plasma processing gases / Loucas G. Christophorou and James K. Olthoff
(Physics of atoms and molecules)
Material Type | Books |
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Publisher | New York : Kluwer Academic/Plenum Publishers |
Classification | LCC:QC794.6.C6 DC22:539.7/57 |
Year | c2004 |
Size | xii, 776 p. : ill. ; 26 cm |
URL |
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Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
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3F |
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426BB||Chr | 50011162 |
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Notes | Includes bibliographical references and index |
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Authors | Christophorou, L. G. Olthoff, James Kenneth, 1958- |
Subjects | LCSH:Electron-molecule collisions LCSH:Plasma (Ionized gases) |
ID | 1000069682 |
NCID | BA65557815 |