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Ion beams; with applications to ion implantation / Robert G. Wilson, George R. Brewer

Material Type Books
Publisher New York : Wiley
Classification LCC:TK7871.85
DC:621.3815/2/028
Year c1973
Size xii, 500 p : illus ; 23 cm

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3F
426AB||Wil 10205862

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Notes "A Wiley-Interscience publication."
Includes bibliographies
Authors *Wilson, Robert G.
Brewer, George Raymond, 1922-
Subjects LCSH:Ion implantation
LCSH:Ion bombardment
ID 1000064225
NCID BA13999253

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