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Radio frequency power in plasmas : 14th Topical Conference : Oxnard, California 7-9 May 2001 / editors, Tak Kuen Mau, John deGrassie
(AIP conference proceedings ; 595)

Material Type Books
Publisher Melville, N.Y : American Institute of Physics
Year c2001
Size xvi, 544 p. : ill. ; 25 cm

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426BB||Pc-Rad||2001 50007962