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Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A. / editors, B.R. Appleton, F.H. Eisen, T.W. Sigmon
(Materials Research Society symposia proceedings ; v. 45)
| Material Type | Books |
|---|---|
| Publisher | Pittsburgh, Pa. : Materials Research Society |
| Classification | LCC:TK7871.85 DC19:621.3815/2 |
| Year | c1985 |
| Size | xv, 393 p. : ill. ; 24 cm |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
|---|---|---|---|---|---|---|
| 3F |
|
510A||Pc-Ion||1985 | 10020535 |
|
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| Notes | "These proceedings are a referred account of the Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology presented at the 1985 spring meeting of the Materials Research Society, April 15-18, 1985, in San Francisco, California."--Pref Includes bibliographies and indexes |
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| Authors | Appleton, B. R. Eisen, Fred H. Sigmon, T. W. Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology (1985 : San Francisco, Calif.) Materials Research Society Materials Research Society. Meeting (1985 : San Francisco, Cafif.) |
| Subjects | LCSH:Semiconductors -- Congresses
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LCSH:Ion implantation -- Congresses All Subject Search |
| ID | 1000056872 |
| NCID | BA03908025 |