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<図書>
Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A. / editors, B.R. Appleton, F.H. Eisen, T.W. Sigmon
(Materials Research Society symposia proceedings ; v. 45)

データ種別 図書
出版情報 Pittsburgh, Pa. : Materials Research Society , c1985
分 類 LCC:TK7871.85
DC19:621.3815/2
大きさ xv, 393 p. : ill. ; 24 cm

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3F
510A||Pc-Ion||1985 10020535

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一般注記 "These proceedings are a referred account of the Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology presented at the 1985 spring meeting of the Materials Research Society, April 15-18, 1985, in San Francisco, California."--Pref
Includes bibliographies and indexes
著者標目 Appleton, B. R.
Eisen, Fred H.
Sigmon, T. W.
Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology (1985 : San Francisco, Calif.)
Materials Research Society
Materials Research Society. Meeting (1985 : San Francisco, Cafif.)
件 名 LCSH:Semiconductors -- Congresses  全ての件名で検索
LCSH:Ion implantation -- Congresses  全ての件名で検索
書誌ID 1000056872
NCID BA03908025

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