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＜Books＞
Ion implantation in microelectronics : a comprehensive bibliography / A. H. Agajanian
(Computer science information guides ; v. 1)
| Material Type | Books |
|---|---|
| Publisher | New York : IFI/Plenum |
| Classification | LCC:Z5838.S4 LCC:TK7871.85 DC19:016.621381/71 |
| Year | c1981 |
| Size | x, 255 p. ; 26 cm |
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| Notes | Includes indexes ***遡及データをもとにした流用入力である |
|---|---|
| Authors | *Agajanian, A. H. |
| Subjects | LCSH:Semiconductor doping -- Bibliography
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LCSH:Ion implantation -- Bibliography All Subject Search |
| ID | 1000056653 |
| NCID | BA27974534 |