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Handbook of ion implantation technology / edited by J.F. Ziegler

Material Type Books
Publisher Amsterdam ; New York : North-Holland
Classification LCC:QC702.7.I55
DC20:530.4/16
Year 1992
Size vii, 700 p. : ill. ; 25 cm

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3F
429AA||Zie 10176675

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Other titles variant access title:Ion implantation technology
Notes Includes bibliographical references and index
Authors Ziegler, J. F.
Subjects LCSH:Ion bombardment
ID 1000055261
NCID BA18974475

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