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Ion implantation / Heiner Ryssel and Ingolf Ruge

Material Type Books
Publisher Chichester [West Sussex] ; New York : Wiley
Classification LCC:TK7871.85
DC19:621.3815/2
Year c1986
Size xvii, 459 p. : ill. ; 24 cm

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3F
429AA||Rys 10176451

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Other titles original title:Ionenimplantation
Notes Translation of: Ionenimplantation
Includes index
Authors *Ryssel, Heiner, 1941-
Ruge, Ingolf
Subjects LCSH:Ion implantation
LCSH:Semiconductors
ID 1000055231
NCID BA00364146

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