<Books>
Ion implantation / Heiner Ryssel and Ingolf Ruge
Material Type | Books |
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Publisher | Chichester [West Sussex] ; New York : Wiley |
Classification | LCC:TK7871.85 DC19:621.3815/2 |
Year | c1986 |
Size | xvii, 459 p. : ill. ; 24 cm |
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Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
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3F |
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429AA||Rys | 10176451 |
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Other titles | original title:Ionenimplantation |
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Notes | Translation of: Ionenimplantation Includes index |
Authors | *Ryssel, Heiner, 1941- Ruge, Ingolf |
Subjects | LCSH:Ion implantation LCSH:Semiconductors |
ID | 1000055231 |
NCID | BA00364146 |