Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982

＜Books＞
Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982 / editors, H. Ryssel and H. Glawischnig
(Springer series in electrophysics ; v. 10)

Material Type	Books
Publisher	Berlin ; New York : Springer-Verlag
Classification	LCC:TK7871.85 DC19:621.3815/2
Year	1982
Size	xii, 372 p. : ill. ; 24 cm
URL

Location	Volume	Call No.	Barcode No.	Status	Comments	Reserve
3F	: gw	429AA\|\|Pc-Ion\|\|1982	10176055 Contents PDF

Notes	Includes bibliographies and index
Authors	*Ion Implantation School (1982 : Berchtesgaden, Germany) Ryssel, Heiner, 1941- Glawischnig, H. (Hans), 1939- International Conference on Ion Implantation: Equipment and Techniques
Subjects	LCSH:Ion implantation -- Addresses, essays, lectures All Subject Search LCSH:Semiconductor doping -- Addresses, essays, lectures All Subject Search
ID	1000055210
NCID	BA07160406