Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982

＜図書＞
Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982 / editors, H. Ryssel and H. Glawischnig
(Springer series in electrophysics ; v. 10)

データ種別	図書
出版者	Berlin ; New York : Springer-Verlag
分　類	LCC:TK7871.85 DC19:621.3815/2
出版年	1982
大きさ	xii, 372 p. : ill. ; 24 cm
URL

配架場所	巻　次	請求記号	資料番号	状　態	コメント	予約
3F	: gw	429AA\|\|Pc-Ion\|\|1982	10176055 目次PDF

一般注記	Includes bibliographies and index
著者標目	*Ion Implantation School (1982 : Berchtesgaden, Germany) Ryssel, Heiner, 1941- Glawischnig, H. (Hans), 1939- International Conference on Ion Implantation: Equipment and Techniques
件　名	LCSH:Ion implantation -- Addresses, essays, lectures 全ての件名で検索 LCSH:Semiconductor doping -- Addresses, essays, lectures 全ての件名で検索
書誌ID	1000055210
NCID	BA07160406