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Ion implantation range and energy deposition distributions

Material Type Books
Publisher New York : Plenum Press
Classification LCC:QC702.7.I55
DC:541/.372
Year [1975]
Size 2 v. : ill. ; 28 cm

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1 v. 1 High incident ion energies / David K. Brice New York : Plenum Press , [1975]
2 v. 2 Low incident ion energies / K. Bruce Winterbon New York : Plenum Press , 1975

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Subjects LCSH:Ion implantation
ID 1000055049
NCID BA01201613

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