Mendeley出力
＜図書＞
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood
(Materials science and process technology series)
| データ種別 | 図書 |
|---|---|
| 出版者 | Park Ridge, N.J. : Noyes Publications |
| 分 類 | LCC:TA2020 DC19:621.044 |
| 出版年 | c1990 |
| 大きさ | xxiii, 523 p. : ill. ; 25 cm |
書誌詳細を非表示
| 一般注記 | Includes bibliographical references and index |
|---|---|
| 著者標目 | Rossnagel, Stephen M. Cuomo, J. J. Westwood, William D. (William Dickson), 1937- |
| 件 名 | LCSH:Plasma engineering LCSH:Semiconductors -- Etching 全ての件名で検索 LCSH:Plasma etching |
| 書誌ID | 1000054330 |
| NCID | BA18754617 |