<Books>
High vacuum production in the microelectronics industry / Pierre Duval
(Plasma technology ; 2)
Material Type | Books |
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Publisher | Amsterdam; Tokyo : Elsevier |
Classification | DC19:621.5/5 |
Year | 1988 |
Size | xiii, 222 p. : ill. ; 25 cm |
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Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
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3F |
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426E||Pla||2 | 10045987 |
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Notes | Includes index |
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Authors | *Duval, Pierre |
Subjects | PRECIS:Microelectronics industries. Applications of vacuum technology |
ID | 1000054322 |
NCID | BA03949791 |