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Laser processing of thin films and microstructures : oxidation, deposition and etching of insulators / Ian W. Boyd
(Springer series in materials science ; v. 3)
| Material Type | Books |
|---|---|
| Publisher | Berlin ; New York : Springer-Verlag |
| Classification | LCC:TA1677 DC19:621.36/6 |
| Year | c1987 |
| Size | viii, 320 p. : ill. ; 24 cm |
| URL |
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| Notes | Bibliography: p. 287-313 Includes index |
|---|---|
| Authors | *Boyd, Ian W. |
| Subjects | LCSH:Lasers -- Industrial applications All Subject Search |
| ID | 1000052798 |
| NCID | BA01434688 |