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Ion implantation : science and technology / edited by J.F. Ziegler

Material Type Books
Publisher Orlando, FL : Academic Press
Classification LCC:QC702.7.I55
DC19:539/.6
Year 1984
Size 635 p. ; 24 cm

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3F alk. paper 429AA||Zie 10176667

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Notes Includes index
Authors Ziegler, J. F.
Subjects LCSH:Ion implantation
ID 1000045431
NCID BA01370949

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