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Ion beams : with applications to ion implantation / Robert G. Wilson, George R. Brewer

Material Type Books
Publisher Huntington, N.Y. : R. E. Krieger Pub. Co.
Classification LCC:TK7871.85
DC:621.3815/2
Year 1979
Size xii, 500 p. : ill. ; 24 cm + 2 leaves of plates in pocket

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3F
426AB||Wil 10005429

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Notes Reprint of the ed. published by Wiley, New York, 1973
Includes bibliographies and index
Authors *Wilson, Robert G.
Brewer, George Raymond, 1922- joint author
Subjects LCSH:Ion implantation
LCSH:Semiconductors
LCSH:Microelectronics
ID 1000022605
NCID BA07380661

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