<Books>
Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg
Material Type | Books |
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Publisher | New York : Wiley |
Classification | NDC8:427.6 LCC:QC718.5.D9 DC20:530.4/4 |
Year | c1994 |
Size | xxvi, 572 p. : ill. ; 25 cm |
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Location | Volume | Call No. | Barcode No. | Status | Comments | Reserve |
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3F |
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426BB||Lie | 10027449 |
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Notes | Includes bibliographical references (p. 559-564) and index "A Wiley-Interscience publication." |
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Authors | *Lieberman, M. A. (Michael A.) Lichtenberg, Allan J |
Subjects | LCSH:Plasma dynamics LCSH:Thin films -- Surfaces All Subject Search LCSH:Plasma etching LCSH:Plasma chemistry |
ID | 1000017308 |
NCID | BA2405445X |